{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9678020","patent":{"patent_number":"US-9678020","title":"Apparatus and method for inspection of substrate defect","assignee":null,"inventors":[],"filing_date":"2015-07-09T00:00:00.000Z","publication_date":"2017-06-13T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G01N"],"num_claims":17,"abstract":"Example embodiments relate to an apparatus and method for inspecting a substrate defect. The substrate defect inspecting apparatus includes a substrate, a light source emitting an infrared beam to the substrate, a detector detecting the infrared beam reflected from the substrate, and a defect analyzer receiving first information and second information from the detector and analyzing defects existing in the substrate. According to at least one example embodiment, the second information is acquired during a later process than the first information."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus and method for inspection of substrate defect","description":"Example embodiments relate to an apparatus and method for inspecting a substrate defect. The substrate defect inspecting apparatus includes a substrate, a light source emitting an infrared beam to the","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9678020","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9678020","citation_suggestion":"Patentable. \"Apparatus and method for inspection of substrate defect\" (US-9678020). https://patentable.app/patents/US-9678020","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9678020","json":"https://patentable.app/api/llm-context/US-9678020","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:21:05.453Z"}