{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9678023","patent":{"patent_number":"US-9678023","title":"Method of determining surface orientation of single crystal wafer","assignee":null,"inventors":[],"filing_date":"2013-05-31T00:00:00.000Z","publication_date":"2017-06-13T00:00:00.000Z","cpc_codes":["G01N","H01L","G01N","G01N"],"num_claims":5,"abstract":"Provided is a method of determining a surface orientation of a single crystal wafer. The method of determining a surface orientation of a single crystal wafer using high resolution X-ray rocking curve measurement may determine a surface angle of the wafer and a direction of the surface angle using rocking curve measurement of a high resolution X-ray diffraction method and measuring a misalignment angle formed by a rotation axis of a measuring apparatus and a surface normal of the wafer and an orientation of the misalignment angle."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of determining surface orientation of single crystal wafer","description":"Provided is a method of determining a surface orientation of a single crystal wafer. The method of determining a surface orientation of a single crystal wafer using high resolution X-ray rocking curve","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9678023","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9678023","citation_suggestion":"Patentable. \"Method of determining surface orientation of single crystal wafer\" (US-9678023). https://patentable.app/patents/US-9678023","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9678023","json":"https://patentable.app/api/llm-context/US-9678023","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:22:02.270Z"}