{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9678421","patent":{"patent_number":"US-9678421","title":"Target element types for process parameter metrology","assignee":null,"inventors":[],"filing_date":"2015-07-09T00:00:00.000Z","publication_date":"2017-06-13T00:00:00.000Z","cpc_codes":["G06F","H01L"],"num_claims":22,"abstract":"Metrology targets, target design methods and metrology methods are provided. Metrology targets comprise target elements belonging to two or more target element types. Each target element type comprises unresolved features which offset specified production parameters to a specified extent and thus provide sensitivity monitoring and optimization tools for process parameters such as focus and dose."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Target element types for process parameter metrology","description":"Metrology targets, target design methods and metrology methods are provided. Metrology targets comprise target elements belonging to two or more target element types. Each target element type comprise","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9678421","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9678421","citation_suggestion":"Patentable. \"Target element types for process parameter metrology\" (US-9678421). https://patentable.app/patents/US-9678421","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9678421","json":"https://patentable.app/api/llm-context/US-9678421","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T15:41:21.386Z"}