{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9679086","patent":{"patent_number":"US-9679086","title":"Method and apparatus for process window modeling","assignee":null,"inventors":[],"filing_date":"2014-05-23T00:00:00.000Z","publication_date":"2017-06-13T00:00:00.000Z","cpc_codes":["G06F"],"num_claims":11,"abstract":"A photolithographic modeling process is disclosed. Optical and non-optical parts of a model of the photolithographic process are calibrated. With the non-optical part of the model one or more model corrections are determined between (i) modeled critical dimension data from an aerial image generated by the optical part of the model, and (ii) empirical critical dimension data from tangible structures made at only a first process combination of a first dose and a first defocus in the photolithographic process. Critical dimension data of the photolithographic process are predicted at a second process combination of a second dose and a second defocus in the photolithographic process."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and apparatus for process window modeling","description":"A photolithographic modeling process is disclosed. Optical and non-optical parts of a model of the photolithographic process are calibrated. With the non-optical part of the model one or more model co","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9679086","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9679086","citation_suggestion":"Patentable. \"Method and apparatus for process window modeling\" (US-9679086). https://patentable.app/patents/US-9679086","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9679086","json":"https://patentable.app/api/llm-context/US-9679086","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:10:54.062Z"}