{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9679823","patent":{"patent_number":"US-9679823","title":"Metric for recognizing correct library spectrum","assignee":null,"inventors":[],"filing_date":"2013-03-15T00:00:00.000Z","publication_date":"2017-06-13T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":18,"abstract":"A method of controlling polishing of a substrate is described. A controller stores a library having a plurality of reference spectra. The controller polishes a substrate and measures a sequence of spectra of light from the substrate during polishing. For each measured spectrum of the sequence of spectra, the controller finds a best matching reference spectrum from the plurality of reference spectra and generates a sequence of best matching reference spectra. The controller uses a cell counting technique for finding the best matching reference spectrum. The controller determines at least one of a polishing endpoint or an adjustment for a polishing rate based on the sequence of best matching reference spectra."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Metric for recognizing correct library spectrum","description":"A method of controlling polishing of a substrate is described. A controller stores a library having a plurality of reference spectra. The controller polishes a substrate and measures a sequence of spe","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9679823","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9679823","citation_suggestion":"Patentable. \"Metric for recognizing correct library spectrum\" (US-9679823). https://patentable.app/patents/US-9679823","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9679823","json":"https://patentable.app/api/llm-context/US-9679823","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:25:02.996Z"}