{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9685297","patent":{"patent_number":"US-9685297","title":"Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system","assignee":null,"inventors":[],"filing_date":"2012-08-28T00:00:00.000Z","publication_date":"2017-06-20T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":19,"abstract":"Systems, methods and apparatus for regulating ion energies in a plasma chamber and chucking a substrate to a substrate support are disclosed. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a defined distribution of energies of ions at the surface of the substrate so as to effectuate the defined distribution of ion energies on a time-averaged basis."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system","description":"Systems, methods and apparatus for regulating ion energies in a plasma chamber and chucking a substrate to a substrate support are disclosed. An exemplary method includes placing a substrate in a plas","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9685297","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9685297","citation_suggestion":"Patentable. \"Systems and methods for monitoring faults, anomalies, and other characteristics of a switched mode ion energy distribution system\" (US-9685297). https://patentable.app/patents/US-9685297","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9685297","json":"https://patentable.app/api/llm-context/US-9685297","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:23:30.560Z"}