{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9685342","patent":{"patent_number":"US-9685342","title":"Wafer processing apparatuses and methods of operating the same","assignee":null,"inventors":[],"filing_date":"2014-12-11T00:00:00.000Z","publication_date":"2017-06-20T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":17,"abstract":"Wafer processing apparatuses and methods of operating the same are provided herein. In an embodiment, a wafer processing apparatus includes a rotatable platen that has the capacity to support a polishing pad on a pad mounting surface of the rotatable platen. A drive assembly is coupled to the rotatable platen and has the capacity to rotate the rotatable platen. A polishing head is coupled to a head actuator. The polishing head is disposed adjacent to and over a first portion of the pad mounting surface and the polishing head is movable relative to the pad mounting surface by the head actuator. An optical sensor has a vision field including a second portion of the pad mounting surface. The first portion and the second portion of the pad mounting surface are at least partially offset. A control unit is operatively connected to the drive assembly and the head actuator."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Wafer processing apparatuses and methods of operating the same","description":"Wafer processing apparatuses and methods of operating the same are provided herein. In an embodiment, a wafer processing apparatus includes a rotatable platen that has the capacity to support a polish","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9685342","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9685342","citation_suggestion":"Patentable. \"Wafer processing apparatuses and methods of operating the same\" (US-9685342). https://patentable.app/patents/US-9685342","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9685342","json":"https://patentable.app/api/llm-context/US-9685342","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:33:55.600Z"}