{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9689656","patent":{"patent_number":"US-9689656","title":"Workpiece holder and method using same for detecting lateral displacement of workpiece","assignee":null,"inventors":[],"filing_date":"2013-10-01T00:00:00.000Z","publication_date":"2017-06-27T00:00:00.000Z","cpc_codes":["G01D","H01L","H01L"],"num_claims":9,"abstract":"Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with use of the workpiece holding apparatus. The workpiece holding apparatus, which is configured to hold the workpiece (w), with an adhesive pad (2) mounted on a support plate, includes: a capacitance measuring device (5) including an electrode pair formed of first and second electrodes (3a, 3b) and arranged at least at a part of a position corresponding to a peripheral edge portion of the workpiece (w), the capacitance measuring device (5) being configured to measure capacitance of the electrode pair; and a comparator circuit (6) configured to compare the measured capacitance with a predetermined reference value, to thereby detect lateral displacement of the workpiece (w) in a planar direction of the support plate (1). Further, the method of detecting lateral displacement of a workpiece (w) includes comparing the capacitance input to the comparator circuit (6) with a predetermined reference value, to thereby detect the lateral displacement of the workpiece (w)."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Workpiece holder and method using same for detecting lateral displacement of workpiece","description":"Provided are a workpiece holding apparatus capable of detecting lateral displacement of a workpiece (w) in a planar direction, and a method of detecting lateral displacement of a workpiece (w) with us","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9689656","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9689656","citation_suggestion":"Patentable. \"Workpiece holder and method using same for detecting lateral displacement of workpiece\" (US-9689656). https://patentable.app/patents/US-9689656","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9689656","json":"https://patentable.app/api/llm-context/US-9689656","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:15:01.377Z"}