{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9690879","patent":{"patent_number":"US-9690879","title":"Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe","assignee":null,"inventors":[],"filing_date":"2013-09-10T00:00:00.000Z","publication_date":"2017-06-27T00:00:00.000Z","cpc_codes":["G06F"],"num_claims":3,"abstract":"Provided is a method of automatically setting, in a recipe, a process parameter (PP) according to the number of substrates to be processed. The method includes (a) displaying a process parameter of a process recipe on a display unit; (b) displaying a parameter name in a process parameter file on the display unit; (c) generating a first recipe by substituting the process parameter with the parameter name; (d) downloading the first recipe and one of a plurality of condition tables corresponding to the selected number of substrates when the number of substrates to be processed in a processing chamber is selected; and (e) generating a second recipe by substituting the process parameter of the downloaded one of the condition tables for the parameter name in the downloaded first recipe."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe","description":"Provided is a method of automatically setting, in a recipe, a process parameter (PP) according to the number of substrates to be processed. The method includes (a) displaying a process parameter of a ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9690879","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9690879","citation_suggestion":"Patentable. \"Substrate processing apparatus, method of manufacturing semiconductor device, and method of generating recipe\" (US-9690879). https://patentable.app/patents/US-9690879","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9690879","json":"https://patentable.app/api/llm-context/US-9690879","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:05:57.854Z"}