{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9691143","patent":{"patent_number":"US-9691143","title":"Inspection apparatus and inspection apparatus system","assignee":null,"inventors":[],"filing_date":"2013-10-08T00:00:00.000Z","publication_date":"2017-06-27T00:00:00.000Z","cpc_codes":["G06T","G06T","H04N","G06T","G06T"],"num_claims":7,"abstract":"A first output value evaluation device obtains an average value of output values of optical image data for each of unit regions and creates a distribution map of an average value in an inspected region. A first defect history management device creates a distribution map related with the shape of the pattern from the distribution map of the average value and holds the created distribution map. A second output value evaluation device obtains at least one of a variation value and deviation of the output value of each pixel in the unit region. A defect determination device compares the obtained value with a threshold value. A second defect history management device holds information of the output value determined as a defect in the defect determination device. A defect/defect history analysis device analyzes, and checks the information from the first defect history management device and the second defect history management device."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Inspection apparatus and inspection apparatus system","description":"A first output value evaluation device obtains an average value of output values of optical image data for each of unit regions and creates a distribution map of an average value in an inspected regio","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9691143","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9691143","citation_suggestion":"Patentable. \"Inspection apparatus and inspection apparatus system\" (US-9691143). https://patentable.app/patents/US-9691143","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9691143","json":"https://patentable.app/api/llm-context/US-9691143","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T15:06:11.523Z"}