{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9691587","patent":{"patent_number":"US-9691587","title":"Dimension measurement apparatus calibration standard and method for forming the same","assignee":null,"inventors":[],"filing_date":"2014-06-30T00:00:00.000Z","publication_date":"2017-06-27T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":20,"abstract":"A method for forming a dimension measurement apparatus calibration standard over a substrate is provided. The method includes forming strip structures over the substrate. The method includes depositing a calibration material layer over the substrate and the strip structures. The calibration material layer and the strip structures are made of different materials. The method includes removing the calibration material layer over top surfaces of the strip structures to expose the strip structures. The method includes removing the strip structures. The calibration material layer remaining over sidewalls of the strip structures forms linear calibration structures."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Dimension measurement apparatus calibration standard and method for forming the same","description":"A method for forming a dimension measurement apparatus calibration standard over a substrate is provided. The method includes forming strip structures over the substrate. The method includes depositin","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9691587","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9691587","citation_suggestion":"Patentable. \"Dimension measurement apparatus calibration standard and method for forming the same\" (US-9691587). https://patentable.app/patents/US-9691587","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9691587","json":"https://patentable.app/api/llm-context/US-9691587","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:43:24.608Z"}