{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9691640","patent":{"patent_number":"US-9691640","title":"Mechanisms for cleaning load ports of semiconductor process tools","assignee":null,"inventors":[],"filing_date":"2013-09-11T00:00:00.000Z","publication_date":"2017-06-27T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"Embodiments of mechanisms for cleaning load ports of semiconductor process tools are provided. The automatic system includes a vacuum cleaner, a rail, and a transport mechanism. The transport mechanism is moveably disposed on the rail and transfers the vacuum cleaner along the rail. The automatic system also includes a system controller. The system controller is connected to the semiconductor process tools and the transport mechanism to detect which load port is unoccupied, such that the system controller controls the transport mechanism to transfer the vacuum cleaner to the unoccupied load port to perform a cleaning process."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Mechanisms for cleaning load ports of semiconductor process tools","description":"Embodiments of mechanisms for cleaning load ports of semiconductor process tools are provided. The automatic system includes a vacuum cleaner, a rail, and a transport mechanism. The transport mechanis","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9691640","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9691640","citation_suggestion":"Patentable. \"Mechanisms for cleaning load ports of semiconductor process tools\" (US-9691640). https://patentable.app/patents/US-9691640","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9691640","json":"https://patentable.app/api/llm-context/US-9691640","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:03:55.742Z"}