{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9696150","patent":{"patent_number":"US-9696150","title":"Overlay error measuring device and computer program","assignee":null,"inventors":[],"filing_date":"2013-06-10T00:00:00.000Z","publication_date":"2017-07-04T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N"],"num_claims":8,"abstract":"The purpose of the present invention is to provide an overlay error measuring device for correcting a pattern displacement other than an overlay error to thereby achieve high-precision overlay error measurement. To accomplish the abovementioned purpose, the present invention proposes an overlay error measuring device which measures a dimension between a plurality of patterns belonging to different layers using a signal obtained by a charged particle beam device, and when measuring the dimension, corrects an amount corresponding to a pattern shift due to an optical proximity effect and measures the dimension between the plurality of patterns."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Overlay error measuring device and computer program","description":"The purpose of the present invention is to provide an overlay error measuring device for correcting a pattern displacement other than an overlay error to thereby achieve high-precision overlay error m","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9696150","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9696150","citation_suggestion":"Patentable. \"Overlay error measuring device and computer program\" (US-9696150). https://patentable.app/patents/US-9696150","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9696150","json":"https://patentable.app/api/llm-context/US-9696150","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T04:40:59.769Z"}