{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9696717","patent":{"patent_number":"US-9696717","title":"Apparatus and method of segmenting sensor data output from a semiconductor manufacturing facility","assignee":null,"inventors":[],"filing_date":"2014-05-16T00:00:00.000Z","publication_date":"2017-07-04T00:00:00.000Z","cpc_codes":["G05B","G05B"],"num_claims":20,"abstract":"An apparatus and method of segmenting sensor data are provided. The apparatus includes a sensor, a first segmentation unit, a continuity evaluation unit, a second segmentation unit, and a segmentation determination unit. The sensor collects sensor data for a process of the semiconductor manufacturing facility. The first segmentation unit extracts a variation point of the sensor data to perform an abnormal difference (AD) segmentation on the sensor data based on the at least one variation point. The continuity evaluation unit evaluates a continuity ratio of the sensor data. The second segmentation unit performs a free-knot spline (FS) segmentation on the sensor data when the continuity ratio exceeds a reference ratio. The segmentation determination unit compares the AD segmentation result with the FS segmentation result and to select one of the results on the comparison result."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus and method of segmenting sensor data output from a semiconductor manufacturing facility","description":"An apparatus and method of segmenting sensor data are provided. The apparatus includes a sensor, a first segmentation unit, a continuity evaluation unit, a second segmentation unit, and a segmentation","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9696717","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9696717","citation_suggestion":"Patentable. \"Apparatus and method of segmenting sensor data output from a semiconductor manufacturing facility\" (US-9696717). https://patentable.app/patents/US-9696717","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9696717","json":"https://patentable.app/api/llm-context/US-9696717","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T15:45:02.895Z"}