{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9698073","patent":{"patent_number":"US-9698073","title":"Method of manufacturing element chip and element chip","assignee":null,"inventors":[],"filing_date":"2016-09-14T00:00:00.000Z","publication_date":"2017-07-04T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":3,"abstract":"In a plasma processing step in a method of manufacturing an element chip in which a plurality of element chips are manufactured by dividing a substrate, which has a plurality of element regions, the substrate is divided into element chips by exposing the substrate to first plasma. In a protection film forming step of forming a protection film covering a side surface and a second surface by exposing the element chips to second plasma of which raw material gas is mixed gas of carbon fluoride and helium, protection film forming conditions are set such that a thickness of a second protection film of the second surface is greater than a thickness of a first protection film of the side surface."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of manufacturing element chip and element chip","description":"In a plasma processing step in a method of manufacturing an element chip in which a plurality of element chips are manufactured by dividing a substrate, which has a plurality of element regions, the s","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9698073","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9698073","citation_suggestion":"Patentable. \"Method of manufacturing element chip and element chip\" (US-9698073). https://patentable.app/patents/US-9698073","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9698073","json":"https://patentable.app/api/llm-context/US-9698073","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:49:15.502Z"}