{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9698178","patent":{"patent_number":"US-9698178","title":"Array substrate, method for manufacturing the same, and display apparatus","assignee":null,"inventors":[],"filing_date":"2015-04-30T00:00:00.000Z","publication_date":"2017-07-04T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"A method for manufacturing an array substrate includes coating a photoresist onto an insulation layer including a gate insulation layer and an etch stop layer, wherein the gate insulation layer covers a conductive pattern and the etch stop layer covers a semiconductive pattern. The method further includes exposing the photoresist to form a photoresist partially-reserved region and a photoresist unreserved region. The method further includes performing a first etching process to at least partially remove a portion of the insulation layer located at a position corresponding to the photoresist unreserved region, to form an intermediate hole. The method further includes performing a second etching process to form the first via hole and form the second via hole at a position of the intermediate hole, thereby to reveal the semiconductive pattern and the conductive pattern at positions corresponding to the first via hole and the second via hole, respectively."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Array substrate, method for manufacturing the same, and display apparatus","description":"A method for manufacturing an array substrate includes coating a photoresist onto an insulation layer including a gate insulation layer and an etch stop layer, wherein the gate insulation layer covers","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9698178","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9698178","citation_suggestion":"Patentable. \"Array substrate, method for manufacturing the same, and display apparatus\" (US-9698178). https://patentable.app/patents/US-9698178","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9698178","json":"https://patentable.app/api/llm-context/US-9698178","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:05:48.056Z"}