{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9698234","patent":{"patent_number":"US-9698234","title":"Interface layer for gate stack using O3 post treatment","assignee":null,"inventors":[],"filing_date":"2015-03-24T00:00:00.000Z","publication_date":"2017-07-04T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":26,"abstract":"Exemplary embodiments provide for fabricating a field effect transistor (FET) with an interface layer for a gate stack using an O3 post treatment. Aspects of the exemplary embodiments include: forming a semiconductor body upon a substrate; cleaning the surface of the semiconductor body; depositing a first dielectric layer on the semiconductor body; performing an O3 treatment to form a new interface layer that incorporates material from the substrate and material from the first dielectric layer; and performing gate stack processing, including deposition of a gate electrode."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Interface layer for gate stack using O3 post treatment","description":"Exemplary embodiments provide for fabricating a field effect transistor (FET) with an interface layer for a gate stack using an O3 post treatment. Aspects of the exemplary embodiments include: forming","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9698234","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9698234","citation_suggestion":"Patentable. \"Interface layer for gate stack using O3 post treatment\" (US-9698234). https://patentable.app/patents/US-9698234","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9698234","json":"https://patentable.app/api/llm-context/US-9698234","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T15:35:04.308Z"}