{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9702698","patent":{"patent_number":"US-9702698","title":"Angular velocity sensor and manufacturing method therefor","assignee":null,"inventors":[],"filing_date":"2015-07-27T00:00:00.000Z","publication_date":"2017-07-11T00:00:00.000Z","cpc_codes":["G01C","G01C","G01C"],"num_claims":12,"abstract":"One or more vibration plate layers of a diaphragm part are formed by a thin film forming technique. When a resonance frequency in a resonance vibration mode calculated from dimensions of a structure of an angular velocity sensor and an elastic parameter of a material thereof is defined as f kilohertz, a mass of a weight part is defined as M milligrams, a circumference of the diaphragm part is defined as r meters, a stress applied to a piezoelectric layer is defined as σp pascals, a thickness thereof is defined as tp meters, a stress applied to an n-th layer from the weight part in a vibration plate portion constituted by a plurality of layers including a lower electrode and the vibration plate layers is defined as σn pascals, and a thickness thereof is defined as tn meters (where n is a natural number), Teff expressed by Teff=r(σptp+Σσntn)/M satisfies {(−0.36f2+210)/33}≦Teff≦{(0.44f2+210)/33}."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Angular velocity sensor and manufacturing method therefor","description":"One or more vibration plate layers of a diaphragm part are formed by a thin film forming technique. When a resonance frequency in a resonance vibration mode calculated from dimensions of a structure o","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9702698","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9702698","citation_suggestion":"Patentable. \"Angular velocity sensor and manufacturing method therefor\" (US-9702698). https://patentable.app/patents/US-9702698","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9702698","json":"https://patentable.app/api/llm-context/US-9702698","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T13:35:09.298Z"}