{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9702728","patent":{"patent_number":"US-9702728","title":"Method of fabricating micro-glassblown gyroscopes","assignee":null,"inventors":[],"filing_date":"2014-11-19T00:00:00.000Z","publication_date":"2017-07-11T00:00:00.000Z","cpc_codes":["G01C","G01C"],"num_claims":22,"abstract":"A method of making a Coriolis vibratory gyroscope with a three dimensional mushroom resonator element includes defining a cavity in a substrate wafer; bonding a cap wafer onto the substrate over the cavity from which cap wafer the resonator element will be formed; heating the substrate and cap wafer to generate a pressure build-up within the cavity; plastically deforming the cap wafer by the pressure build-up to form the mushroom resonator element having a perimeter around the mushroom resonator element; releasing the three dimensional mushroom resonator element at the perimeter by selectively removing material so that the perimeter of mushroom resonator element is free to vibrate; and disposing a layer of conductive material on the mushroom resonator element to form electrodes thereon for use in driving and sensing vibrations of the mushroom resonator element and its perimeter. A microgyroscope made by such a method is also included within the embodiments."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of fabricating micro-glassblown gyroscopes","description":"A method of making a Coriolis vibratory gyroscope with a three dimensional mushroom resonator element includes defining a cavity in a substrate wafer; bonding a cap wafer onto the substrate over the c","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9702728","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9702728","citation_suggestion":"Patentable. \"Method of fabricating micro-glassblown gyroscopes\" (US-9702728). https://patentable.app/patents/US-9702728","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9702728","json":"https://patentable.app/api/llm-context/US-9702728","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:27:48.569Z"}