{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9703188","patent":{"patent_number":"US-9703188","title":"Agglutinat for pellicle, a pellicle using it and a method for evaluating pellicle","assignee":null,"inventors":[],"filing_date":"2015-11-03T00:00:00.000Z","publication_date":"2017-07-11T00:00:00.000Z","cpc_codes":["G01N"],"num_claims":13,"abstract":"A pellicle is proposed in which the agglutinant layer which enable the pellicle to be adhered to a photomask is doped with a mechanoluminescent material so that the uniformness of the thickness of the agglutinant layer can be confirmed, when the pellicle is adhered to the photomask, by observing visually or by CCD camera for any irregularity in the pattern of the light emitted from the agglutinant layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Agglutinat for pellicle, a pellicle using it and a method for evaluating pellicle","description":"A pellicle is proposed in which the agglutinant layer which enable the pellicle to be adhered to a photomask is doped with a mechanoluminescent material so that the uniformness of the thickness of the","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9703188","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9703188","citation_suggestion":"Patentable. \"Agglutinat for pellicle, a pellicle using it and a method for evaluating pellicle\" (US-9703188). https://patentable.app/patents/US-9703188","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9703188","json":"https://patentable.app/api/llm-context/US-9703188","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:16:28.985Z"}