{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9703207","patent":{"patent_number":"US-9703207","title":"System and method for reducing dynamic range in images of patterned regions of semiconductor wafers","assignee":null,"inventors":[],"filing_date":"2012-07-09T00:00:00.000Z","publication_date":"2017-07-11T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":26,"abstract":"The present invention includes generating illumination, providing a spatial light modulator (SLM) configured to selectably illuminate one or more portions of a surface of a wafer using the generated illumination, receiving a sets of wafer pattern data indicative of one or more patterns of the wafer, translating the wafer along a direction, selectably controlling a pixel configuration of the SLM to control an illumination pattern on the surface of the wafer, a first pixel configuration illuminating a first set of regions of the wafer at an illumination level, an additional pixel configuration illuminating an additional set of regions at an additional illumination level, wherein a pixel pattern of the SLM based on the received sets of wafer pattern data is configured to move across a surface of the SLM synchronously with the pattern of the translated wafer, and detecting illumination from the surface of the wafer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"System and method for reducing dynamic range in images of patterned regions of semiconductor wafers","description":"The present invention includes generating illumination, providing a spatial light modulator (SLM) configured to selectably illuminate one or more portions of a surface of a wafer using the generated i","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9703207","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9703207","citation_suggestion":"Patentable. \"System and method for reducing dynamic range in images of patterned regions of semiconductor wafers\" (US-9703207). https://patentable.app/patents/US-9703207","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9703207","json":"https://patentable.app/api/llm-context/US-9703207","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T03:40:24.780Z"}