{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9710905","patent":{"patent_number":"US-9710905","title":"Mask inspection apparatus and mask inspection method","assignee":null,"inventors":[],"filing_date":"2015-07-10T00:00:00.000Z","publication_date":"2017-07-18T00:00:00.000Z","cpc_codes":["G06T","G06T","G06T"],"num_claims":20,"abstract":"In a mask inspection apparatus, a defect detection unit includes a first memory region, a second memory region, an inspection condition reconfiguring unit, and a comparison unit. The inspection condition reconfiguring unit obtains a difference between gray scales of an optical image stored in the second memory region and a reference image stored in the first memory region. The existence of the defect is determined in the case where the difference is larger than a first threshold value. Further in the case where the number of defects is larger than a second threshold value, an inspection condition is re-estimated and configured and the reference image is regenerated. A comparison unit compares the stored reference image with the stored optical image in the case where the inspection condition is not reconfigured, and compares the regenerated reference image with the stored optical image in the case where the inspection condition is reconfigured."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Mask inspection apparatus and mask inspection method","description":"In a mask inspection apparatus, a defect detection unit includes a first memory region, a second memory region, an inspection condition reconfiguring unit, and a comparison unit. The inspection condit","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9710905","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9710905","citation_suggestion":"Patentable. \"Mask inspection apparatus and mask inspection method\" (US-9710905). https://patentable.app/patents/US-9710905","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9710905","json":"https://patentable.app/api/llm-context/US-9710905","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T13:38:29.685Z"}