{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9711369","patent":{"patent_number":"US-9711369","title":"Method for forming patterns with sharp jogs","assignee":null,"inventors":[],"filing_date":"2015-03-16T00:00:00.000Z","publication_date":"2017-07-18T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"The present disclosure provides a method for forming patterns in a semiconductor device. The method includes forming a main pattern on a substrate; forming a spacer on sidewalls of the main pattern; forming a cut pattern having an opening by a first lithography process; and performing a cut process to selectively remove portions of the spacer within the opening of the cut pattern while the main pattern remains unetched, thereby defining a circuit pattern by the main pattern and the spacer. The circuit pattern includes a sharp jog."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for forming patterns with sharp jogs","description":"The present disclosure provides a method for forming patterns in a semiconductor device. The method includes forming a main pattern on a substrate; forming a spacer on sidewalls of the main pattern; f","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9711369","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9711369","citation_suggestion":"Patentable. \"Method for forming patterns with sharp jogs\" (US-9711369). https://patentable.app/patents/US-9711369","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9711369","json":"https://patentable.app/api/llm-context/US-9711369","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:40:46.260Z"}