{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9711423","patent":{"patent_number":"US-9711423","title":"Methods for manufacturing semiconductor device and for detecting end point of dry etching","assignee":null,"inventors":[],"filing_date":"2016-07-08T00:00:00.000Z","publication_date":"2017-07-18T00:00:00.000Z","cpc_codes":["H01L","G01N","G01N","G01N","H01L","H01L","H01L","H01L","H01L","H01L","H01L","G01N","G01N","G01N","H01L"],"num_claims":14,"abstract":"A via hole is accurately formed in an interlayer insulating film over a metal wiring. Of emission spectra of plasma to be used for dry etching of the interlayer insulating film, the emission intensities of at least CO, CN, and AlF are monitored such that an end point of the dry etching of the interlayer insulating film is detected based on the emission intensities thereof."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Methods for manufacturing semiconductor device and for detecting end point of dry etching","description":"A via hole is accurately formed in an interlayer insulating film over a metal wiring. Of emission spectra of plasma to be used for dry etching of the interlayer insulating film, the emission intensiti","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9711423","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9711423","citation_suggestion":"Patentable. \"Methods for manufacturing semiconductor device and for detecting end point of dry etching\" (US-9711423). https://patentable.app/patents/US-9711423","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9711423","json":"https://patentable.app/api/llm-context/US-9711423","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T16:31:09.738Z"}