{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9718100","patent":{"patent_number":"US-9718100","title":"Spray unit and apparatus for cleaning substrate having spray unit","assignee":null,"inventors":[],"filing_date":"2015-09-10T00:00:00.000Z","publication_date":"2017-08-01T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":10,"abstract":"A spray unit, including a body assembly including a solution supply port, the solution port to supply cleaning solution; a flow channel in the body assembly, the flow channel connected with the solution supply port, the cleaning solution to flow through the flow channel; and a spray slit connected to the flow channel, the spray slit to spray out the cleaning solution, the flow channel including at least two chambers to hold the cleaning solution and at least two internal slits connecting the chambers to each other."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Spray unit and apparatus for cleaning substrate having spray unit","description":"A spray unit, including a body assembly including a solution supply port, the solution port to supply cleaning solution; a flow channel in the body assembly, the flow channel connected with the soluti","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9718100","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9718100","citation_suggestion":"Patentable. \"Spray unit and apparatus for cleaning substrate having spray unit\" (US-9718100). https://patentable.app/patents/US-9718100","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9718100","json":"https://patentable.app/api/llm-context/US-9718100","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:15:58.402Z"}