{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9719920","patent":{"patent_number":"US-9719920","title":"Scatterometry system and method for generating non-overlapping and non-truncated diffraction images","assignee":null,"inventors":[],"filing_date":"2014-09-26T00:00:00.000Z","publication_date":"2017-08-01T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":36,"abstract":"Scatterometry measurement systems, illumination configurations and respective methods are provided, which comprise illumination beams that have vertical projections on a target plane comprising both a parallel component and a perpendicular component, with respect to a target measurement direction. The illumination beams propagate at an angle to the plane defined by the measurement direction and a normal to the targets surface and generate diffraction images which are off-center at the imaging pupil plane. The eccentric diffraction images are spatially arranged to avoid overlaps and to correspond to measurement requirements such as spot sizes, number of required diffraction orders and so forth. The illumination beams may be implemented using illumination pupil masks, which provide a simple way to increase scatterometry measurements throughput."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Scatterometry system and method for generating non-overlapping and non-truncated diffraction images","description":"Scatterometry measurement systems, illumination configurations and respective methods are provided, which comprise illumination beams that have vertical projections on a target plane comprising both a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9719920","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9719920","citation_suggestion":"Patentable. \"Scatterometry system and method for generating non-overlapping and non-truncated diffraction images\" (US-9719920). https://patentable.app/patents/US-9719920","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9719920","json":"https://patentable.app/api/llm-context/US-9719920","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:03:13.430Z"}