{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9719940","patent":{"patent_number":"US-9719940","title":"Compressive sensing with illumination patterning","assignee":null,"inventors":[],"filing_date":"2015-10-05T00:00:00.000Z","publication_date":"2017-08-01T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G01N","G01N","G01N","G01N"],"num_claims":10,"abstract":"Methods and systems are provided, which pattern an illumination of a metrology target with respect to spectral ranges and/or polarizations, illuminate a metrology target by the patterned illumination, and measure radiation scattered from the target by directing, at a pupil plane, selected pupil plane pixels from a to respective single detector(s) by applying a collection pattern to the pupil plane pixels. Single detector measurements (compressive sensing) has increased light sensitivity which is utilized to pattern the illumination and further enhance the information content of detected scattered radiation with respect to predefined metrology parameters."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Compressive sensing with illumination patterning","description":"Methods and systems are provided, which pattern an illumination of a metrology target with respect to spectral ranges and/or polarizations, illuminate a metrology target by the patterned illumination,","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9719940","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9719940","citation_suggestion":"Patentable. \"Compressive sensing with illumination patterning\" (US-9719940). https://patentable.app/patents/US-9719940","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9719940","json":"https://patentable.app/api/llm-context/US-9719940","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:16:36.781Z"}