{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9720335","patent":{"patent_number":"US-9720335","title":"Driving system and driving method, and exposure apparatus and exposure method","assignee":null,"inventors":[],"filing_date":"2013-07-09T00:00:00.000Z","publication_date":"2017-08-01T00:00:00.000Z","cpc_codes":["G05B","G05B"],"num_claims":48,"abstract":"A synthetic controlled variable is obtained by obtaining a synthetic quantity using measurement results of a first and a second measuring instruments and corresponding gains (or transfer function) and synthesizing the synthetic quantity and one of the measurement results of the first and the second measuring instruments, respectively, via a high pass filter and a low pass filter. A feedback control system is structured that obtains a control input using a synthetic controlled variable and a desired value, and gives a plant the control input. This makes adding of a high pass filter for removing offset of installation position of the first and the second measuring instruments no longer necessary, and allows a driving system which controls robust driving in a high bandwidth of a plate stage regardless of bandwidth in which resonance appears to be designed."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Driving system and driving method, and exposure apparatus and exposure method","description":"A synthetic controlled variable is obtained by obtaining a synthetic quantity using measurement results of a first and a second measuring instruments and corresponding gains (or transfer function) and","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9720335","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9720335","citation_suggestion":"Patentable. \"Driving system and driving method, and exposure apparatus and exposure method\" (US-9720335). https://patentable.app/patents/US-9720335","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9720335","json":"https://patentable.app/api/llm-context/US-9720335","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:47:14.853Z"}