{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9720407","patent":{"patent_number":"US-9720407","title":"Substrate processing system, substrate processing apparatus and method for accumulating data for substrate processing apparatus","assignee":null,"inventors":[],"filing_date":"2014-06-19T00:00:00.000Z","publication_date":"2017-08-01T00:00:00.000Z","cpc_codes":["G05B","G05B","G06F","G05B"],"num_claims":10,"abstract":"A substrate processing system includes a monitored data receiving unit receiving a plurality of types of monitored data; a temporary memory unit periodically storing the monitored data; a monitored data rate detection unit detecting, as a monitored data rate, a total number of times each type of monitored data changes during a first time period by more than a predetermined amount; a monitored data writing allocation unit allocating a storing frequency to each type of monitored data based on the monitored data rate and an upper limit; a monitored data writing unit writing the monitored data to the temporary memory unit during the second time period based on the storing frequency; an accumulative memory unit storing the monitored data for a plurality of periods; and an accumulative data writing unit reading the monitored data for every third time period and storing the monitored data in the accumulative memory unit."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing system, substrate processing apparatus and method for accumulating data for substrate processing apparatus","description":"A substrate processing system includes a monitored data receiving unit receiving a plurality of types of monitored data; a temporary memory unit periodically storing the monitored data; a monitored da","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9720407","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9720407","citation_suggestion":"Patentable. \"Substrate processing system, substrate processing apparatus and method for accumulating data for substrate processing apparatus\" (US-9720407). https://patentable.app/patents/US-9720407","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9720407","json":"https://patentable.app/api/llm-context/US-9720407","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:16:12.772Z"}