{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9721762","patent":{"patent_number":"US-9721762","title":"Method and system managing execution of preventative maintenance operation in semiconductor manufacturing equipment","assignee":null,"inventors":[],"filing_date":"2014-08-29T00:00:00.000Z","publication_date":"2017-08-01T00:00:00.000Z","cpc_codes":["G05B","G05B"],"num_claims":19,"abstract":"Provided are a method and a system for managing semiconductor manufacturing equipment. The method may be performed using an equipment computer and may include ordering to perform a preventive maintenance to a chamber and parts in the chamber, monitoring a result of the preventive maintenance to the chamber and the parts, and performing a manufacturing process using plasma reaction in the chamber, if the result of the preventive maintenance is normal. The monitoring the result of the preventive maintenance may include a pre-screening method monitoring the result of the preventive maintenance using electric reflection coefficients obtained from the chamber and the parts without using the plasma reaction."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and system managing execution of preventative maintenance operation in semiconductor manufacturing equipment","description":"Provided are a method and a system for managing semiconductor manufacturing equipment. The method may be performed using an equipment computer and may include ordering to perform a preventive maintena","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9721762","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9721762","citation_suggestion":"Patentable. \"Method and system managing execution of preventative maintenance operation in semiconductor manufacturing equipment\" (US-9721762). https://patentable.app/patents/US-9721762","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9721762","json":"https://patentable.app/api/llm-context/US-9721762","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:44:50.595Z"}