{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9726489","patent":{"patent_number":"US-9726489","title":"Mode-matched single proof-mass dual-axis gyroscope and method of fabrication","assignee":null,"inventors":[],"filing_date":"2011-12-05T00:00:00.000Z","publication_date":"2017-08-08T00:00:00.000Z","cpc_codes":["G01C","G01C","G01C"],"num_claims":37,"abstract":"A single proof-mass, dual-axis gyroscope apparatus comprises a resonating body member and first and second electrodes each capacitively coupled to the resonating body member by a respective lateral capacitive air gap and a vertical capacitive air gap. The width of one of the lateral capacitive air gap of the first electrode is substantially smaller than the vertical capacitive air gap. The width of one of the vertical capacitive air gap of the second electrode is substantially smaller than the lateral capacitive air gap. The apparatus claimed can address the process variation such as vertical and lateral dimension variation by electrostatic tuning method."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Mode-matched single proof-mass dual-axis gyroscope and method of fabrication","description":"A single proof-mass, dual-axis gyroscope apparatus comprises a resonating body member and first and second electrodes each capacitively coupled to the resonating body member by a respective lateral ca","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9726489","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9726489","citation_suggestion":"Patentable. \"Mode-matched single proof-mass dual-axis gyroscope and method of fabrication\" (US-9726489). https://patentable.app/patents/US-9726489","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9726489","json":"https://patentable.app/api/llm-context/US-9726489","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:39:49.203Z"}