{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9726940","patent":{"patent_number":"US-9726940","title":"Active matrix substrate manufacturing method, display apparatus manufacturing method, and display apparatus","assignee":null,"inventors":[],"filing_date":"2014-08-28T00:00:00.000Z","publication_date":"2017-08-08T00:00:00.000Z","cpc_codes":["G02F","G02F","G02F","G02F","G02F","G02F","G02F","G02F","G02F"],"num_claims":6,"abstract":"According to an embodiment of the present invention, an active matrix substrate manufacturing method includes: a step (a) of forming a thin film transistor on a substrate; a step (b) of forming an interlayer insulating layer covering the thin film transistor; a step (c) of forming a first electrode after the step (b); a step (d) of forming, after the step (c), a photospacer by applying a photosensitive resin material to the substrate and patterning the photosensitive resin material; and a step (e) of performing, after the step (d), plasma processing using a gas that contains a fluorine-based gas but does not contain oxygen gas."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Active matrix substrate manufacturing method, display apparatus manufacturing method, and display apparatus","description":"According to an embodiment of the present invention, an active matrix substrate manufacturing method includes: a step (a) of forming a thin film transistor on a substrate; a step (b) of forming an int","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9726940","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9726940","citation_suggestion":"Patentable. \"Active matrix substrate manufacturing method, display apparatus manufacturing method, and display apparatus\" (US-9726940). https://patentable.app/patents/US-9726940","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9726940","json":"https://patentable.app/api/llm-context/US-9726940","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:17:43.593Z"}