{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9727049","patent":{"patent_number":"US-9727049","title":"Qualitative fault detection and classification system for tool condition monitoring and associated methods","assignee":null,"inventors":[],"filing_date":"2012-09-04T00:00:00.000Z","publication_date":"2017-08-08T00:00:00.000Z","cpc_codes":["G05B","G05B","G05B"],"num_claims":19,"abstract":"The present disclosure provides various methods for tool condition monitoring, including systems for implementing such monitoring. An exemplary method includes receiving data associated with a process performed on wafers by an integrated circuit manufacturing process tool; and monitoring a condition of the integrated circuit manufacturing process tool using the data. The monitoring includes evaluating the data based on an abnormality identification criterion, an abnormality filtering criterion, and an abnormality threshold to determine whether the data meets an alarm threshold. The method may further include issuing an alarm when the data meets the alarm threshold."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Qualitative fault detection and classification system for tool condition monitoring and associated methods","description":"The present disclosure provides various methods for tool condition monitoring, including systems for implementing such monitoring. An exemplary method includes receiving data associated with a process","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9727049","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9727049","citation_suggestion":"Patentable. \"Qualitative fault detection and classification system for tool condition monitoring and associated methods\" (US-9727049). https://patentable.app/patents/US-9727049","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9727049","json":"https://patentable.app/api/llm-context/US-9727049","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:23:12.291Z"}