{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9733567","patent":{"patent_number":"US-9733567","title":"Reticle transmittance measurement method, and projection exposure method using the same","assignee":null,"inventors":[],"filing_date":"2015-09-21T00:00:00.000Z","publication_date":"2017-08-15T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N"],"num_claims":3,"abstract":"When a reticle is first used, the reticle is loaded in a projection exposure device and measured by either oblique measurement and random measurement, thereby avoiding the fear of uneven sampling and determining the reticle transmittance of the entire reticle as the parent population, without increasing the sampling count. The same effect can be obtained by making the measurement spot size, which is fixed in general, variable and by changing the angle of incidence in relation to the measurement spot size."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Reticle transmittance measurement method, and projection exposure method using the same","description":"When a reticle is first used, the reticle is loaded in a projection exposure device and measured by either oblique measurement and random measurement, thereby avoiding the fear of uneven sampling and ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9733567","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9733567","citation_suggestion":"Patentable. \"Reticle transmittance measurement method, and projection exposure method using the same\" (US-9733567). https://patentable.app/patents/US-9733567","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9733567","json":"https://patentable.app/api/llm-context/US-9733567","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T13:36:43.291Z"}