{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9734568","patent":{"patent_number":"US-9734568","title":"Automated inline inspection and metrology using shadow-gram images","assignee":null,"inventors":[],"filing_date":"2015-02-24T00:00:00.000Z","publication_date":"2017-08-15T00:00:00.000Z","cpc_codes":["G01N","G06T","G06T","G06T","G06T","G06V","G06V","G06T","G06T","G06V"],"num_claims":15,"abstract":"Shadow-grams are used for edge inspection and metrology of a stacked wafer. The system includes a light source that directs collimated light at an edge of the stacked wafer, a detector opposite the light source, and a controller connected to the detector. The stacked wafer can rotate with respect to the light source. The controller analyzes a shadow-gram image of the edge of the stacked wafer. Measurements of a silhouette of the stacked wafer in the shadow-gram image are compared to predetermined measurements. Multiple shadow-gram images at different points along the edge of the stacked wafer can be aggregated and analyzed."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Automated inline inspection and metrology using shadow-gram images","description":"Shadow-grams are used for edge inspection and metrology of a stacked wafer. The system includes a light source that directs collimated light at an edge of the stacked wafer, a detector opposite the li","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9734568","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9734568","citation_suggestion":"Patentable. \"Automated inline inspection and metrology using shadow-gram images\" (US-9734568). https://patentable.app/patents/US-9734568","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9734568","json":"https://patentable.app/api/llm-context/US-9734568","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T19:50:41.587Z"}