{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9735246","patent":{"patent_number":"US-9735246","title":"Air-gap top spacer and self-aligned metal gate for vertical fets","assignee":null,"inventors":[],"filing_date":"2016-05-11T00:00:00.000Z","publication_date":"2017-08-15T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":12,"abstract":"Transistors and method of forming he same include forming a fin on a bottom source/drain region having a channel region and a sacrificial region on the channel region. A gate stack is formed on sidewalls of the channel region. A gate conductor is formed in contact with the gate stack that has a top surface that meets a middle point of sidewalls of the sacrificial region. The sacrificial region is trimmed to create gaps above the gate stack. A top spacer is formed on the gate conductor having airgaps above the gate stack."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Air-gap top spacer and self-aligned metal gate for vertical fets","description":"Transistors and method of forming he same include forming a fin on a bottom source/drain region having a channel region and a sacrificial region on the channel region. A gate stack is formed on sidewa","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9735246","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9735246","citation_suggestion":"Patentable. \"Air-gap top spacer and self-aligned metal gate for vertical fets\" (US-9735246). https://patentable.app/patents/US-9735246","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9735246","json":"https://patentable.app/api/llm-context/US-9735246","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:58:16.426Z"}