{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9735266","patent":{"patent_number":"US-9735266","title":"Self-aligned contact for trench MOSFET","assignee":null,"inventors":[],"filing_date":"2013-06-19T00:00:00.000Z","publication_date":"2017-08-15T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":20,"abstract":"A trench metal oxide semiconductor field effect transistor (MOSFET) includes an epitaxial layer over a substrate a first trench in the epitaxial layer and a second trench in the epitaxial layer. A depth of the first trench is different from a depth of the second trench. The trench MOSFET further includes a source region surrounding the self-aligned source contact, wherein the source region is convex-shaped. The trench MOSFET further includes a self-aligned source contact between the first trench and the second trench; wherein the self-aligned source contact is connected to the source region."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Self-aligned contact for trench MOSFET","description":"A trench metal oxide semiconductor field effect transistor (MOSFET) includes an epitaxial layer over a substrate a first trench in the epitaxial layer and a second trench in the epitaxial layer. A dep","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9735266","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9735266","citation_suggestion":"Patentable. \"Self-aligned contact for trench MOSFET\" (US-9735266). https://patentable.app/patents/US-9735266","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9735266","json":"https://patentable.app/api/llm-context/US-9735266","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:18:31.116Z"}