{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9739723","patent":{"patent_number":"US-9739723","title":"Methods of defect inspection for photomasks","assignee":null,"inventors":[],"filing_date":"2016-06-23T00:00:00.000Z","publication_date":"2017-08-22T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G01N"],"num_claims":14,"abstract":"A method of defect inspection for a photomask is provided. According to the method, a light transmittance correction is performed to reduce a light transmittance of a calibration key pattern region of a photomask including a field region and the calibration key pattern region to the light transmittance of the field region. Light calibration is performed using the calibration key pattern region having corrected light transmittance. Defect inspection for the field region is performed by applying a result of the light calibration."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Methods of defect inspection for photomasks","description":"A method of defect inspection for a photomask is provided. According to the method, a light transmittance correction is performed to reduce a light transmittance of a calibration key pattern region of","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9739723","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9739723","citation_suggestion":"Patentable. \"Methods of defect inspection for photomasks\" (US-9739723). https://patentable.app/patents/US-9739723","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9739723","json":"https://patentable.app/api/llm-context/US-9739723","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:59:09.709Z"}