{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9740190","patent":{"patent_number":"US-9740190","title":"Method for programming a three-dimensional workpiece scan path for a metrology system","assignee":null,"inventors":[],"filing_date":"2014-10-09T00:00:00.000Z","publication_date":"2017-08-22T00:00:00.000Z","cpc_codes":["G05B","G05B","G05B","G05B","G05B"],"num_claims":20,"abstract":"A method for programming a three-dimensional (3D) workpiece scan path for a metrology system comprising a 3D motion control system, a first type of Z-height sensing system, and a second type of Z-height sensing system that provides less precise surface Z-height measurements over a broader Z-height measuring range. The method comprises: placing a representative workpiece on a stage of the metrology system, defining at least a first workpiece scan path segment for the representative workpiece, determining preliminary actual surface Z-height measurements along the first workpiece scan path segment, and determining a precise 3D scan path for moving the first type of Z-height sensing system to perform precise surface Z-height measurements. The precise 3D scan path is based on the determined preliminary actual surface Z-height measurements. The precise 3D scan path may be used for performing precise surface Z-height measurements or stored to be used in an inspection program."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for programming a three-dimensional workpiece scan path for a metrology system","description":"A method for programming a three-dimensional (3D) workpiece scan path for a metrology system comprising a 3D motion control system, a first type of Z-height sensing system, and a second type of Z-heig","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9740190","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9740190","citation_suggestion":"Patentable. \"Method for programming a three-dimensional workpiece scan path for a metrology system\" (US-9740190). https://patentable.app/patents/US-9740190","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9740190","json":"https://patentable.app/api/llm-context/US-9740190","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:19:57.654Z"}