{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9740648","patent":{"patent_number":"US-9740648","title":"Substrate treatment apparatus that controls respective units by master-slave method","assignee":null,"inventors":[],"filing_date":"2015-01-13T00:00:00.000Z","publication_date":"2017-08-22T00:00:00.000Z","cpc_codes":["G06F","G05B","H01L"],"num_claims":10,"abstract":"A valve control unit includes a data reading/selecting unit, which reads each of signals transmitted onto a serial bus, and selects a flow rate data signal from among the read signals. Therefore, the valve control unit can acquire the flow rate data signal from the serial bus without allowing the flow rate data signal to pass via the master IC. As a result, it is made possible to ensure real time properties of feedback control, which adjusts a needle valve based on a measurement result of a flowmeter, while reducing a load applied to a CPU that controls the master IC. Moreover, it is not necessary to provide an additional instrument for transferring analog signals between slave devices, and accordingly, a size increase and cost increase of an apparatus can be suppressed."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate treatment apparatus that controls respective units by master-slave method","description":"A valve control unit includes a data reading/selecting unit, which reads each of signals transmitted onto a serial bus, and selects a flow rate data signal from among the read signals. Therefore, the ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9740648","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9740648","citation_suggestion":"Patentable. \"Substrate treatment apparatus that controls respective units by master-slave method\" (US-9740648). https://patentable.app/patents/US-9740648","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9740648","json":"https://patentable.app/api/llm-context/US-9740648","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:39:24.806Z"}