{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9740805","patent":{"patent_number":"US-9740805","title":"Method and system for detecting hotspots for photolithographically-defined devices","assignee":null,"inventors":[],"filing_date":"2015-12-01T00:00:00.000Z","publication_date":"2017-08-22T00:00:00.000Z","cpc_codes":["G06F"],"num_claims":10,"abstract":"A method detects hot spots from overlay error data for photolithography defined device(s). The overlay error data corresponds to data for sites on a substrate for the photolithography defined device(s). The overlay error data is converted to residual overlay data, which indicates a residual overlay error for each of the sites. The residual overlay error is based on an expected overlay error for each of the sites. It is determined whether group(s) of overlay error sites are present. Each group includes at least two nearest neighbor sites that have the residual overlay error greater than a threshold. For each group of overlay error sites, it is determined whether the group fits a physical model, such as the derivative of a Gaussian, for a hotspot. Each group fitting the physical model is categorized as a hotspot. Hotspot parameters are determined for each group that fits the physical model."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and system for detecting hotspots for photolithographically-defined devices","description":"A method detects hot spots from overlay error data for photolithography defined device(s). The overlay error data corresponds to data for sites on a substrate for the photolithography defined device(s","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9740805","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9740805","citation_suggestion":"Patentable. \"Method and system for detecting hotspots for photolithographically-defined devices\" (US-9740805). https://patentable.app/patents/US-9740805","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9740805","json":"https://patentable.app/api/llm-context/US-9740805","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:17:59.787Z"}