{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9741621","patent":{"patent_number":"US-9741621","title":"Nano wire structure and method for fabricating the same","assignee":null,"inventors":[],"filing_date":"2017-02-10T00:00:00.000Z","publication_date":"2017-08-22T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":20,"abstract":"A method comprises depositing a sacrificial layer on a first dielectric layer over a substrate, applying a first patterning process, a second patterning process, a third patterning process and a fourth patterning process to the sacrificial layer to form a first group of openings, a second group of openings, a third group of openings and a fourth group of openings, respectively, in the sacrificial layer, wherein openings from different patterning processes are arranged in an alternating manner and four openings of the opening from the different patterning processes form a diamond shape and forming nanowires based on the first group of openings, the second group of openings, the third group of openings and the fourth group of openings."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Nano wire structure and method for fabricating the same","description":"A method comprises depositing a sacrificial layer on a first dielectric layer over a substrate, applying a first patterning process, a second patterning process, a third patterning process and a fourt","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9741621","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9741621","citation_suggestion":"Patentable. \"Nano wire structure and method for fabricating the same\" (US-9741621). https://patentable.app/patents/US-9741621","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9741621","json":"https://patentable.app/api/llm-context/US-9741621","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:50:46.223Z"}