{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9741817","patent":{"patent_number":"US-9741817","title":"Method for manufacturing a trench metal insulator metal capacitor","assignee":null,"inventors":[],"filing_date":"2016-01-21T00:00:00.000Z","publication_date":"2017-08-22T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":15,"abstract":"A method for manufacturing a metal insulator metal (MIM) trench capacitor, the method may include forming a cavity in an Intermetal Dielectric stack, wherein a bottom of the cavity exposes a lower metal layer; wherein the Intermetal Dielectric stack comprises a top dielectric layer; depositing a first metal layer on a bottom of a cavity and on sidewalls of the cavity; depositing a sacrificial layer over the first metal layer; filling the cavity with a filling material; removing, by a planarization process, a portion of the sacrificial layer positioned above the top dielectric layer and a portion of the first metal layer positioned above the top dielectric layer to expose an upper portion of the sacrificial layer and an upper portion of the first metal layer; forming a recess by removing the upper portion of the sacrificial layer and the upper portion the first metal layer while using the filling material as a mask; removing the filling material by a first removal process that is selective to the sacrificial layer and to the first metal layer; removing the sacrificial layer by a second removal process that is less aggressive than the first removal process; fabricating an insulator layer on the first metal layer; and depositing a second metal layer on the insulator layer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for manufacturing a trench metal insulator metal capacitor","description":"A method for manufacturing a metal insulator metal (MIM) trench capacitor, the method may include forming a cavity in an Intermetal Dielectric stack, wherein a bottom of the cavity exposes a lower met","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9741817","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9741817","citation_suggestion":"Patentable. \"Method for manufacturing a trench metal insulator metal capacitor\" (US-9741817). https://patentable.app/patents/US-9741817","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9741817","json":"https://patentable.app/api/llm-context/US-9741817","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T03:53:47.386Z"}