{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9746849","patent":{"patent_number":"US-9746849","title":"Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing","assignee":null,"inventors":[],"filing_date":"2012-11-09T00:00:00.000Z","publication_date":"2017-08-29T00:00:00.000Z","cpc_codes":["G05B","G05B","G05B","G06N"],"num_claims":19,"abstract":"A system and method autonomously determines the impact of respective tool parameters on tool performance in a semiconductor manufacturing system. A parameter impact identification system receives tool parameter and performance data for one or more process runs of the semiconductor fabrication system and generates a separate function for each tool parameter characterizing the behavior of a tool performance indicator in terms of a single one of the tool parameters. Each function is then scored according to how well the function predicts the behavior of the tool performance indicator, or based on a determined sensitivity of the tool performance indicator to changes in the single tool parameter. The tool parameters are then ranked based on these scores, and a reduced set of critical tool parameters is derived based on the ranking. The tool performance indicator can then be modeled based on this reduced set of tool parameters."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing","description":"A system and method autonomously determines the impact of respective tool parameters on tool performance in a semiconductor manufacturing system. A parameter impact identification system receives tool","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9746849","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9746849","citation_suggestion":"Patentable. \"Method and apparatus for autonomous tool parameter impact identification system for semiconductor manufacturing\" (US-9746849). https://patentable.app/patents/US-9746849","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9746849","json":"https://patentable.app/api/llm-context/US-9746849","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T15:39:07.545Z"}