{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9747670","patent":{"patent_number":"US-9747670","title":"Method and system for improving wafer surface inspection sensitivity","assignee":null,"inventors":[],"filing_date":"2014-06-24T00:00:00.000Z","publication_date":"2017-08-29T00:00:00.000Z","cpc_codes":["G06T","G06T","G06T","G06T"],"num_claims":22,"abstract":"Improvement of wafer surface inspection sensitivity includes acquiring a first inspection image from the surface of the wafer, generating a reference image by applying a thresholding function to the first image in order to isolate a speckle signal component of the first image induced by wafer surface roughness, acquiring one or more measurement inspection images from the surface of the wafer, and generating a difference image by subtracting the generated one or more reference images from the acquired one or more measurement inspection images."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and system for improving wafer surface inspection sensitivity","description":"Improvement of wafer surface inspection sensitivity includes acquiring a first inspection image from the surface of the wafer, generating a reference image by applying a thresholding function to the f","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9747670","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9747670","citation_suggestion":"Patentable. \"Method and system for improving wafer surface inspection sensitivity\" (US-9747670). https://patentable.app/patents/US-9747670","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9747670","json":"https://patentable.app/api/llm-context/US-9747670","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:20:04.974Z"}