{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9752703","patent":{"patent_number":"US-9752703","title":"Methods and apparatus to reduce shock in a slit valve door","assignee":null,"inventors":[],"filing_date":"2015-04-09T00:00:00.000Z","publication_date":"2017-09-05T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":13,"abstract":"Embodiments disclosed herein generally relate to apparatus and methods for sealing a vacuum chamber with a slit valve assembly that in one embodiment includes a housing having side walls and at least one substrate transfer port formed therein, the housing having an interior volume defined by the side walls, a slit valve door disposed within the housing and positionable between an open position clear of the substrate transfer port and a closed position sealing the substrate transfer port, and a bumper assembly disposed on an edge of at least one face of the slit valve door, the bumper assembly comprising a first bumper member made of a first material and a second bumper made of a second material that is different than the first material."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Methods and apparatus to reduce shock in a slit valve door","description":"Embodiments disclosed herein generally relate to apparatus and methods for sealing a vacuum chamber with a slit valve assembly that in one embodiment includes a housing having side walls and at least ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9752703","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9752703","citation_suggestion":"Patentable. \"Methods and apparatus to reduce shock in a slit valve door\" (US-9752703). https://patentable.app/patents/US-9752703","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9752703","json":"https://patentable.app/api/llm-context/US-9752703","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:16:38.784Z"}