{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9752992","patent":{"patent_number":"US-9752992","title":"Variable image field curvature for object inspection","assignee":null,"inventors":[],"filing_date":"2015-03-19T00:00:00.000Z","publication_date":"2017-09-05T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","H01L","G01N","G01N"],"num_claims":18,"abstract":"Field curvature of an optical system is modified based on topography of the surface of a wafer such that an image of each of the segments of the surface is in focus across the segment. The wafer may be non-planar. The optical system may be a multi-element lens system connected to a controller that modifies the field curvature by changing position of the lens elements. The wafer may be held by a chuck, such as an edge grip chuck. Multiple optical systems may be arranged across a dimension of the wafer."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Variable image field curvature for object inspection","description":"Field curvature of an optical system is modified based on topography of the surface of a wafer such that an image of each of the segments of the surface is in focus across the segment. The wafer may b","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9752992","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9752992","citation_suggestion":"Patentable. \"Variable image field curvature for object inspection\" (US-9752992). https://patentable.app/patents/US-9752992","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9752992","json":"https://patentable.app/api/llm-context/US-9752992","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T03:52:48.877Z"}