{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9755015","patent":{"patent_number":"US-9755015","title":"Air gaps formed by porous silicon removal","assignee":null,"inventors":[],"filing_date":"2016-05-10T00:00:00.000Z","publication_date":"2017-09-05T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":11,"abstract":"Semiconductor structures formed using a substrate that has a porous semiconductor layer and a device layer on the porous semiconductor layer. One or more trench isolation regions are formed in the device layer that surround an active device region. An opening is formed that extends through the one or more trench isolation regions to the porous semiconductor layer. A removal agent is directed through the opening to remove the porous semiconductor layer from a volume beneath the active device region and thereby form an air gap vertically beneath the active device region."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Air gaps formed by porous silicon removal","description":"Semiconductor structures formed using a substrate that has a porous semiconductor layer and a device layer on the porous semiconductor layer. One or more trench isolation regions are formed in the dev","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9755015","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9755015","citation_suggestion":"Patentable. \"Air gaps formed by porous silicon removal\" (US-9755015). https://patentable.app/patents/US-9755015","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9755015","json":"https://patentable.app/api/llm-context/US-9755015","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:50:39.053Z"}