{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9759656","patent":{"patent_number":"US-9759656","title":"Inspection apparatus and inspection method","assignee":null,"inventors":[],"filing_date":"2017-02-09T00:00:00.000Z","publication_date":"2017-09-12T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","H01L","H01L","H01L","H01L"],"num_claims":8,"abstract":"The inspection apparatus includes: a stage that retains the inspection sample; a light irradiator that irradiates the inspection sample with light having a predetermined wavelength to cause the inspection sample to emit a terahertz wave; a detector that detects electric field intensity of the terahertz wave emitted from the inspection sample; and a comparator that compares the electric field intensity of the terahertz wave emitted from the inspection sample to an evaluation reference value. The evaluation reference value is a value (for example, 90% of a saturation value) smaller than an absolute value of the saturation value of the electric field intensity of the terahertz wave, the terahertz wave being generated by irradiating a reference sample, which is a reference of the inspection sample, with the light while different voltages are applied to the reference sample."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Inspection apparatus and inspection method","description":"The inspection apparatus includes: a stage that retains the inspection sample; a light irradiator that irradiates the inspection sample with light having a predetermined wavelength to cause the inspec","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9759656","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9759656","citation_suggestion":"Patentable. \"Inspection apparatus and inspection method\" (US-9759656). https://patentable.app/patents/US-9759656","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9759656","json":"https://patentable.app/api/llm-context/US-9759656","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:03:43.269Z"}