{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9760018","patent":{"patent_number":"US-9760018","title":"Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structure","assignee":null,"inventors":[],"filing_date":"2014-08-05T00:00:00.000Z","publication_date":"2017-09-12T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":19,"abstract":"Methods and inspection apparatus and computer program products for assessing a quality of reconstruction of a value of a parameter of interest of a structure, which may be applied for example in metrology of microscopic structures. It is important the reconstruction provides a value of a parameter of interest (e.g. a CD) of the structure which is accurate as the reconstructed value is used to monitor and/or control a lithographic process. This is a way of assessing a quality of reconstruction (803) of a value of a parameter of interest of a structure which does not require the use of a scanning electron microscope, by predicting (804) values of the parameter of interest of structures using reconstructed values of parameters of structures, and by comparing (805) the predicted values of the parameter of interest and the reconstructed values of the parameter of interest."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structure","description":"Methods and inspection apparatus and computer program products for assessing a quality of reconstruction of a value of a parameter of interest of a structure, which may be applied for example in metro","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9760018","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9760018","citation_suggestion":"Patentable. \"Method and inspection apparatus and computer program product for assessing a quality of reconstruction of a value of a parameter of interest of a structure\" (US-9760018). https://patentable.app/patents/US-9760018","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9760018","json":"https://patentable.app/api/llm-context/US-9760018","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T15:31:16.512Z"}